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Part No: 673-1015980
Part No: 84329111
img{max-width:100%} Varian Semiconductor Equipment E11326000 Decel 1 PS D1/D2 CONTROLLER VIISta Working
PFV35/2-012-V
Model No: 5000 CLEANROOM 4
ADTEC AXR-2000III Plasma Generator Novellus 27-360919-00 No Key Tested Working Part No: 673-1015980ADTEC AXR 2000III Plasma Generator Novellus 27 360919 00 No Key Tested Working Part No: AXR 2000III Novellus Part No: 27 360919 00 Supplier Part No: 10222301 Input: 3, 200 220VAC, 50 60Hz, 4. 1kVA Output: 2000W @ 13. 56MHz CE Marked Made in Japan This item was tested in our facility and is fully functional. The unit requires a remote interlock to function (not included). The unit can be pinned out with pinouts at 3 10 to activate the interlock bypass.
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