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Part No: 1164578
EPROM Part No: 04376-001
Part No: 0100-00504
Electrical Diagram No: 4S066-592-4
This Everex EV-349-02 is used working surplus
Equipe Technologies FPD-3153 Transfer Robot Plasma-Therm Clusterlock 7000 Spare Part No: 1164578Equipe Technologies FPD 3153 Transfer Robot Plasma Therm Clusterlock 7000 Spare Part No: FPD 3153 Removed from a Plasma Therm Clusterlock 7000 PM RIE Reactive Ion Etching System Installed PCB Part No: 2002 0080, FDP400 Interface This item is working surplus. The robot is missing one of the cover panels and also includes a lower frame ring (see photos). The physical condition is good, but there are signs of previous use and handling. Sale Details Item
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